Spincoater for Glove Boxes
- The deposition of a thin layer by centrifugal coating on the flat surface of a substrate or wafer.
- Spin 150 in deck or bench for wafers till 160mm and substrate till 4ʺ x 4ʺ.
- Spin 200 in deck or bench for wafers till 260mm and substrate till 6ʺ x 6ʺ.
- Other on request.
Technical specifications of the Spincoater:
We can recommend two types of integration depending on your priority: an on-deck version that will fit into a rather small workspace and an in-deck version, fixed, but leaving more room for work ergonomics.
The intensive use of solvents requires technical choices
This equipment can be installed on the following glove box models
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