Spincoater for Glove Boxes

Spincoater

 

Purpose:

 

Offered Models

  • Spin 150 in deck or bench for wafers till 160mm and substrate till 4ʺ x 4ʺ.
  • Spin 200 in deck or bench for wafers till 260mm and substrate till 6ʺ x 6ʺ.
  • Other on request.

Technical Specifications

Technical specifications of the Spincoater:

We can recommend two types of integration depending on your priority: an on-deck version that will fit into a rather small workspace and an in-deck version, fixed, but leaving more room for work ergonomics.
The intensive use of solvents requires technical choices

Compatibility

This equipment can be installed on the following glove box models

Modular glove box with autonomous purification unit <1PPM H2O – O2

Compact purified glove box <1PPM H2O – O2 for research and industry

Modular glove box in gas scavenging. Easy to use, low maintenance.

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