Custom-made Glove Boxes for Semiconductor processing
Supporting your projects from laboratory research right through to industrial production lines.
Jacomex designs bespoke glove boxes for the semiconductor industry. Precise control of the atmosphere (O₂, H₂O, particles) for the preparation of wafers and the deposition of thin films without contamination.
Jacomex’s containment chambers and purification systems provide a purified, particle-free atmosphere, preserving the integrity of the wafers and materials used in the manufacture of microchips (deposits of gold, aluminium, copper and modified alloys).
Our technology is designed to remove traces (<1 ppm) of oxygen (O₂) and moisture (H₂O), whilst ensuring a particle-free environment – an essential requirement at every sensitive stage of the process.
Our industry partnerships, with manufacturers of vacuum deposition equipment and other key players in the sector, provide our customers with integrated solutions covering the entire cycle of sample preparation, processing and storage.
Main applications
- Wafer preparation and handling
- Deposition of thin films and coatings
- Transfer and connection to characterisation stations
- Interfacing with vacuum lines
- Storage in an inert atmosphere
- Quantum computing
An environmentally friendly design – Energy savings for everyone!
Protecting our environment should not mean having to make compromises. That is why the energy-saving mode is included and available free of charge on all Jacomex glove boxes.
- Standard power consumption = 198 watts
- Energy-saving mode = up to 31 watts
Standard configuration
Customised solutions – Tailored industrial facilities
- State-of-the-art containment chambers designed for the semiconductor manufacturing process
- Integration of vacuum lines and direct connection to deposition equipment (PVD, ALD, ALE)
- Detachable feed-throughs to save space and time (Class 1 in accordance with ISO 10648-2)
- Integration of transfer stations, spin coaters and slot-die deposition systems
- ISO 5 environment available: unidirectional airflow, ceiling blowers
- Specialised filtration for microelectronics-grade purity
- Ergonomics, risk assessment
Range of purified glove boxes for semiconductor manufacturing
- Controlled atmosphere (<1 ppm O₂ and H₂O) to preserve wafer integrity and prevent sample contamination
- Modular workstations with 2, 3 or 4 gloves, tailored to the size of your production line
- Individual or face-to-face configurations, to integrate with your workshop or cleanroom layout
- Operates using pure gas (argon, nitrogen, helium), ensuring a particle-free environment
- Heated vacuum antechambers, Ø150mm – Ø400mm, for wafer transfer without breaking the vacuum
- User-friendly HMI, user traceability and data logging for 2 months
- Low maintenance for a reduced total cost of ownership (TCO)
- 3-year warranty
Our recommandations for Semiconductors
Gbox
Modular glove box under controlled atmosphere, gas sweeping or climate glove box.
PureEvo
A fully customizable Glovebox system meeting highest expectations, designed to integrate complex processes and third party systems. <1ppm O2 and H2O
PureMod
A modular workstation offering enhanced features for more specialized demands. <1ppm O2 and H2O
Equipment and features
Our recommendations for the semiconductor sector
More realisations
Discover some projects in the Semiconductors industry
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Certifications
ISO and European quality standards
Jacomex is proud to uphold the highest industry standards, with certifications including ISO 9001:2015 for quality management, and ISO 10648-2 for containment enclosures and glove boxes. Additionally, we ensure compliance with EN 60439-1, a self-certification CE standard, reflecting our commitment to safety and reliability.
ISO 9001:2015
Quality Management Systems
Certification and CE Marking
Compliance with European Union regulatory requirements
ISO 10648-2
Tightness standard for containment vessels
ISO 3834
Welding Quality Management System for TIG and YAG